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Ultrahigh-Purity Gas Filters 0.003µm

Inline Gas Filter 

High-Pressure Rating

All-welded construction

All_welded_In_line_Filters_FWSS-FR4_series_fittings_regulators_hoses_fluid_system_assemblies_RTGC_series_general_tied_diaphragm_valves_regulators_20D_series_tube_fitting

All-Welded Inline Filters

Excellent Chemical compatibility

High Particle Removal Efficiency

gasket_filter_GE-15K-FC-10_fittings_regulators_hoses_fluid_system_assemblies_RTGC_series_general_tied_diaphragm_valves_regulators_20D_series_tube_fittings

Gasket Filters

High Purity Gasket Filters

Particulate Inline Filters

Inline Filters

Compact and Space-saving Design

 

Particulate Tee-Type Filters

Stainless Steel T-type Filters

Tube Fittings, NPT, Weld Connection

Particulate Bypass Filters

Bypass Filters

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VIM-VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50°C), Flow Rates to 300 std L/min, 1/2 in. 6.15in.(156.1 mm) Long, CP3 cleaned

Part Number: 62V-F1V-VR8-F30-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50°C), Flow Rates to 300 std L/min, 1/2 in. 6.15in.(156.1 mm) Long, CP3 cleaned

Part Number: 6LV-F1V-VR8-F30-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L Stainless Steel Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 300 std L/min, 1/2 in. 6.15in.(156.1 mm)Long, CP3 cleaned

Part Number: 6L-F1V-VR8-F30-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VIM-VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 200 std L/min, 1/2 in. 5.16in.(131.1 mm)Long, CP3 cleaned

Part Number: 62V-F1V-VR8-F20-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 200 std L/min, 1/2 in. 5.16in.(131.1 mm)Long, CP3 cleaned

Part Number: 6LV-F1V-VR8-F20-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L Stainless Steel Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 200 std L/min, 1/2 in. 5.16in.(131.1 mm)Long, CP3 cleaned

Part Number: 6L-F1V-VR8-F20-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VIM-VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 120 std L/min, 1/2 in. 4.37in.(111.1 mm)Long, CP3 cleaned

Part Number: 62V-F1V-VR8-F12-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 120 std L/min, 1/2 in. 4.37in.(111.1 mm)Long, CP3 cleaned

Part Number: 6LV-F1V-VR8-F12-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L Stainless Steel Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 120 std L/min, 1/2 in. 4.37in.(111.1 mm)Long, CP3 cleaned

Part Number: 6L-F1V-VR8-F12-CP3

Ultrahigh-Purity-Gas-Filters-F1V-Series-316L-Stainless-Steel-inline-Working-Pressures-up-3000-psig-206-bar-Male-VR-Metal-Gasket-Face-Seal2 The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applicationsFeatures High particle removal efficiency Exceptionally low particle shedding Superior moisture dry-down characteristics Extremely low outgassing Outstanding chemical compatibilitHigh differential pressure rating ■ Inline, all-welded construction ■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min ■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings ■ Industry-standard lengths; see Ordering Information and Dimensions.Ceramic element: high-purity alumina Gasket: high-density PTFE Housing: 316L VAR stainless steel/SEMI F20 High-Purity, 20 % minimum elongation allowed..webp

316L VIM-VAR Gas Filters, Working Pressure up to 3000 psig (206 bar), Temperature 120 °F(50℃), Flow Rates to 60 std L/min, 1/2 in. 3.98in.(101.1 mm)Long, CP3 cleaned

Part Number: 62V-F1V-VR8-CP3





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